Evaluation of the four deposition concepts – each criterion is weighted and given a score from 1 to 3
| Criteria | Weight | C1 | C2 | C3 | C4 |
|---|---|---|---|---|---|
| Tool forces | 2 | 1 | 3 | 3 | 1 |
| Process control | 2 | 1 | 2 | 3 | 1 |
| Flash formation | 2 | 1 | 2 | 3 | 2 |
| Oxide removal | 2 | 3 | 1 | 1 | 2 |
| Resolution | 1 | 1 | 2 | 2 | 1 |
| Wire slip | 1 | 1 | 3 | 3 | 3 |
| Contact friction | 1 | 2 | 3 | 3 | 3 |
| Serviceability | 1 | 1 | 2 | 2 | 1 |
| Deposition quality | 3 | 2 | 2 | 2 | 1 |
| Sum | – | 23 | 32 | 36 | 23 |
| Criteria | Weight | C1 | C2 | C3 | C4 |
|---|---|---|---|---|---|
| Tool forces | 2 | 1 | 3 | 3 | 1 |
| Process control | 2 | 1 | 2 | 3 | 1 |
| Flash formation | 2 | 1 | 2 | 3 | 2 |
| Oxide removal | 2 | 3 | 1 | 1 | 2 |
| Resolution | 1 | 1 | 2 | 2 | 1 |
| Wire slip | 1 | 1 | 3 | 3 | 3 |
| Contact friction | 1 | 2 | 3 | 3 | 3 |
| Serviceability | 1 | 1 | 2 | 2 | 1 |
| Deposition quality | 3 | 2 | 2 | 2 | 1 |
| Sum | – | 23 | 32 | 36 | 23 |
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