The purpose of this paper is to develop extreme marine corrosion-resistant coatings and to fabricate TiZrNbTaMoW refractory high-entropy alloy thin films and clarify the effect of sputtering power.
TiZrNbTaMoW refractory high-entropy alloy thin films were fabricated by DC magnetron sputtering. The influence of sputtering power (80/100/120 W) on their microstructure and corrosion properties was investigated.
Sputtering power dominates film density, crystal orientation and composition uniformity. Uniform composition (deviation < 5%) and optimal corrosion resistance are both achieved at 100 W.
This study only focuses on sputtering power without considering other magnetron sputtering parameters. Corrosion tests are only carried out in 3.5 Wt.% NaCl solution.
This work clarifies the sputtering power–microstructure–corrosion property relationship, offering new material and technical support for marine engineering protection.
The regulation mechanism of sputtering power on the films was systematically investigated for the first time, providing a new research basis for refractory high-entropy alloy coatings used in marine environments.
