Carl Zeiss provides precise optical height measurement in the nanometer range
Carl Zeiss provides precise optical height measurement in the nanometer range
Keywords: Nanometers, Optics, Measurement
Carl Zeiss has developed a quick, simple and economic solution for the precise measurement of surface topography, roughness and layer thickness, which will be particularly useful in the rapidly growing field of thin films and coatings. Total interference contrast (TIC) permits the measurement of structures to an accuracy of 20 nm and a depth of 5 microns.
Unlike traditional polarisation interferometers that use linear polarised light and are dependent on the orientation of the sample, TIC uses circular polarised light. Regardless of their orientation, structures in the specimen are visualised and measured simply by turning the TIC prism, eliminating the need for stage rotation and speeding up analysis. The use of circular polarised light also makes TIC insensitive to vibration, so additional absorption units are not required.
"TIC offers precise measurement, fast evaluation, easier specimen preparation, rapid analysis of large-area specimens, and simplicity of operation" says Aubrey Lambert, Marketing Manager at Carl Zeiss UK. "As a combined analysis system and layer thickness measuring system, the combination of a conventional microscope fitted with TIC compares overwhelmingly with conventional layer thickness measuring devices, such as profilometers or scanning force microscopes."
TIC will be particularly beneficial in the development and production of thin films and coatings, which are already used to form chemically inert PTFE coatings, low friction and wear resistant coatings, optical filters and biocompatible surfaces. Measurement of step heights and layer thickness is also widely used in electronics, MEMS, glass and ceramics, and the automotive industry.
"There is no reason to expect that technologists will cease to demand high performance, flexibility, and a rapid return on investment from their optical imaging and measurement systems" continues Lambert. "Innovative optical applications like TIC will continue to ensure that Carl Zeiss remains at the forefront of the industry."
For further information, contact: Carl Zeiss Ltd, PO Box 78, Woodfield Road,Welwyn Garden City, Hertfordshire, AL7 1LU, UK.
