Laser nano sensor
Laser nano sensor
Keywords DynaVision,Lasers, Selcom, Sensors
An economic, flexible,highly-accurate and lightweight non-contact laser nano sensor using auto focus principles with a resolution as fine as five nanometers, a frequency response rate of up to 300kHz one of the fastest in the industry and an equally fast measurement speed has been introduced by Selcom/DynaVision of Southfield, MI, USA and Sensors-95 bv, of Heerlen, The Netherlands (Plate 13). The new sensor will be sold in Europe by Sensors-95 through distributors in France, Italy, Germany, The Netherlands, the UK, Sweden and other areas in Europe which are currently being established.
Ideal for quantifying surface roughness of any highly-reflective material such as glass, precision measurement of silicon wafers, lenses, circuitry or any mirror-type finishes and for semiconductor production, the new patented DynaVision Laser Nano Sensor(LNS) has a measuring range from 8.8 to 300 micrometers, depending on model selected, with an accuracy lower than 0.5 per cent of the measuring range.
Plate 13 Non-contact Laser Nano Sensor, from Selcom/Dynavision
The sensor's small size of 64mm in length, diameter of 20mm, with a weight of 100 grams as well as separate control module make it a good choice for small work envelopes.
Additional applications for the LNS include precision positioning, quality inspection, vibration measurement and differential thickness measuring for precision switching of any surface.
"The Laser Nano Sensor provides a vast array of users in different environments, with fast,high-quality precision measurement for a multitude of applications ranging from high-tech industries measuring silicon wafers and producing semiconductors to checking quality of polished components", noted Cor Maas, chief executive officer for Sensors-95 bv. "All this power and precision is encased in a sturdy high-impact sensor that can fit in the palm of a hand."
Maas also noted that the sensor's high-speed, high accuracy and one of the fastest frequency response rates in the industry also makes it ideal for a multitude of precision,high-tech applications.
LNS detailed
The Selcom/DynaVision Laser Nano Sensor (LNS) is available in four standard models with stand-off distances ranging from 2.3mm to 26mm. Depending on the target, accuracy ranges from 0.022 nanometers to 0.75 nanometers.
The sensors operate in temperatures from O°C to 50°C. For added flexibility, the sensors come with an extra long cable length of 2.5m. Power is provided by a ±15 VOC power source.
The LNS consists of laser diodes, holographic diffraction grating (beam splitter) and bar diode, all totally integrated in a miniature LDGU casing. A signal processor provides for data averaging and filtering, easy integration of application software and transfer of data to the control system.
With the laser autofocus measurement principle, a laser beam is projected on to a highly reflective object surface plated perpendicular to the laser beam path through a system of two high-grade lenses from the miniature laser diode grating unit. The reflected light from the target returns through the same system of lenses and is split by the holographic diffraction grating or beam splitter. As a result, two separate light spots from the beam splitter are focused on a four-part photodiode.
When the object to be measured is precisely at the focal point of the laser beam, the spots are projected on to the centre of photodiode couples. As the object moves towards or away from the sensor, it moves out of the focal point, causing the light spots to move inwards or outwards on the photodiode couples.
The object movement, with respect to the focal point of the laser, is calculated in the electronics by adding the outputs from the exterior and interior diodes and then using normalised values.
Selcom/DynaVision is a joint worldwide sales and marketing company established by Selcom, Inc. Southfield, MI, USA and Dynamic Control Systems (DynaVision) of Delta, BC,Canada.
Together, Selcom and DynaVision offer more than 40 non-contact laser-based measurement sensors and solutions for almost any industry that reduces waste, enhances quality and yield.
The LNS is the latest high-precision non-contact sensor from the Selcom/DynaVision line, which includes the LDS-laser distance sensor and the LTS-laser twin sensor, which uses high-speed position sensitive detector (PSD) technology as well as the SPR-02 and SPR-04-single point sensors and the M24-multi point sensor, which use charge coupled device (CCD) technology for the image detector. Also available is the SLS 5000, SLS 6000 and the new SLS 2000 non-contact sensors from Selcom using a PSD.
Selcom and Dynamic Control Systems have been in the business of providing industrial control products,displacement sensors and services since their inceptions in 1970 and 1976. Sensors-95 was founded in 1995. The three companies have provided solutions for hundreds of different applications in virtually all industries.
For more information on the laser nano sensor, or any other non-contact sensors in Europe, contact Selcom/DynaVision, The Netherlands. Tel: + 31 45 5719300; Fax: +31 45 574 2500;E-mail: cor.maas@tip.nl. For North America or other areas of the world, contact Selcom/DynaVision, USA. Tel: +1(248) 355 5900; Fax: + 1 (248) 355 3283; E-mail: sales@selcominc.com WWW: http://www.dynavision.com; http://www.selcom.se
