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Keywords: Sputtering
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Journal Articles
Aircraft Engineering and Aerospace Technology: An International Journal (1999) 71 (1)
Published: 01 February 1999
... tubing and holes as small as 0.08in. diameter. Comparison of the LIPS process with other plasma sputtering processes There are well-known contemporary methods of sputtering of materials in vacuum to obtain adhesive coatings on the different substrates to be coated: the method of cathode...
