This study describes a novel algorithm for optimizing the quality yield of silicon wafer slicing. 12 inch wafer slicing is the most difficult in terms of semiconductor manufacturing yield. As silicon wafer slicing directly impacts production costs, semiconductor manufacturers are especially concerned with increasing and maintaining the yield, as well as identifying whey yeilds decline. The criteria for establishing the proposed algorithm are derived from a literature review and interviews with a group of experts in semiconductor manufacturing. The modified Delphi method is then adopted to analyze those results. The proposed algorithm also incorporates the analytic hierarchy process (AHP) to determine the weights of evaluation. Additionally, the proposed algorithm can select the evaluation outcomes to identify the worst machine of precision. Finally, results of the exponential weighted moving average (EWMA) control chart demonstrate the feasibility of the proposed AHP‐based algorithm in effectively selecting the evaluation outcomes and evaluating the precision of the worst performing machines. So, through collect data (the quality and quantity) to judge the result by AHP, it is the key to help the engineer can find out the manufacturing process yield quickly effectively.
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21 August 2006
Review Article|
August 21 2006
Online Experts Screening the Worst Slicing Machine to Control Wafer Yield via the Analytic Hierarchy Process Available to Purchase
Chin‐Tsai Lin;
Chin‐Tsai Lin
Graduate Institute of Business Management, Yuanpei University of Science and Technology, 306 Yuanpei St., Hsin Chu 30015, Taiwan, Republic of China
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Che‐Wei Chang;
Che‐Wei Chang
Department of Information Management, Yuanpei University of Science and Technology, 306 Yuanpei St., Hsin Chu 30015, Taiwan, Republic of China
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Cheng‐Ru Wu;
Cheng‐Ru Wu
Department of Finance, Yuanpei University of Science and Technology, 306 Yuanpei St., Hsin Chu 30015, Taiwan, Republic of China
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Huang‐Chu Chen
Huang‐Chu Chen
Graduate Institute of Business Management, Yuanpei University of Science and Technology, 306 Yuanpei St., Hsin Chu 30015, Taiwan, Republic of China
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Publisher: Emerald Publishing
Online ISSN: 2054-555X
Print ISSN: 1598-2688
© Emerald Group Publishing Limited
2006
Asian Journal on Quality (2006) 7 (2): 141–156.
Citation
Lin C, Chang C, Wu C, Chen H (2006), "Online Experts Screening the Worst Slicing Machine to Control Wafer Yield via the Analytic Hierarchy Process". Asian Journal on Quality, Vol. 7 No. 2 pp. 141–156, doi: https://doi.org/10.1108/15982688200600021
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