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Screening Synchronously Occurred Multiple Abnormal Quality Characteristics in a Silicon Wafer Slicing Process

Chin‐Tsai Lin, Chie‐Bein Chen, Che‐Wei Chang

Asian Journal on Quality (2002) 3 (1): 48–60.

https://doi.org/10.1108/15982688200200004

Published: 17 April 2002

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