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Keywords: LPCVD
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Journal Articles
Control characteristics: a case study on semiconductor manufacturing
Available to Purchase
Journal:
Asian Journal on Quality
Asian Journal on Quality (2012) 13 (1): 37–52.
Published: 15 June 2012
...Sang‐Chan Park; Sang‐Chul Lee; Hironobu Kawamura; Ken Nishina; Masanobu Higashide; Tomomichi Suzuki Purpose This paper aims to clarify adequate control characteristics for using a control chart on the basis of a case study of the low‐pressure chemical vapor deposition (LPCVD) process, which is one...
