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Keywords: Photolithography
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Journal Articles
Journal:
Asian Journal on Quality
Asian Journal on Quality (2007) 8 (2): 145–159.
Published: 21 August 2007
... to be effective for wafer fabrication manufacturing, in practical, there is a need to help operators decide which lots should be pulled in the right time and to develop a systematic way to alleviate the long queues at the bottleneck workstation. The purpose of this study is to construct a photolithography...
