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Keywords: Semiconductor
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Journal Articles
Journal:
Asian Journal on Quality
Asian Journal on Quality (2005) 6 (1): 58–73.
Published: 17 April 2005
...Shiaw‐Wen Tien; Yi‐Chan Chung; Chih‐Hung Tsai; Guo‐Ji Hwang The objective of this study is to evaluate the equipment risk before and after SEMI S2‐93A implementation, thus providing a guideline for safety improvement. Semiconductor Plant A located in Taiwan’s Hsinchu Science Based Industrial Park...
