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Keywords: Ultra pure water
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Journal Articles
Journal:
Asian Journal on Quality
Asian Journal on Quality (2005) 6 (3): 173–189.
Published: 18 December 2005
... and the potential impact of a product’s life cycle from raw material procurement, manufacturing, usage, and disposal (that is, from cradle to grave). This study assesses the environmental impact of the ultra pure water process of semiconductor manufacturing by a life‐cycle assessment in order to point out the heavy...
