TWO‐DIMENSIONAL PROCESS SIMULATION USING A QUADRATIC FINITE ELEMENT DISCRETIZATION

The finite element method is used to solve the non‐linear diffusion equation, taking account of the interaction between impurities due to self‐induced electric field and charged vacancies effects, and of various boundary conditions (evaporation, segregation, oxidation growth…). An incomplete implicit scheme gives the solution of the temporal equation deduced from a quadratic space discretization. The temporal and spatial problems being proved to be quite independent, specific locally refined meshes are developed. The quadratic shape functions allow the use of evolutive mesh for the oxidation simulation without profile degradation. Two realistic industrial steps are described to demonstrate the efficiency of the code.