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This paper describes the algorithm used to perform numerical simulation on reverse biased planar junctions. The two‐dimensional Poisson's equation is solved using the finite‐difference method. The program allows one to simulate all kinds of peripheries such as field‐plates, field limiting rings and surface implantations in planar structures. The advantages of this program are the wide use of graphic techniques and the possibility of refining the mesh locally. Results of simulation will be presented in the last section.
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© MCB UP Limited
1985
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