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Keywords: Electrostatic actuator
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Journal Articles
COMPEL (2018) 37 (1): 2–28.
Published: 02 January 2018
... 2018 Emerald Publishing Limited Licensed re-use rights only Finite element simulation Cantilever Coventorware Electrostatic actuator Logic gates NEMS switches Recent developments in micro fabrication technology and severe requirement for enhanced complementary metal oxide...
