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Keywords: Lateral field excitation
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Journal Articles
COMPEL (2012) 31 (6): 1892–1900.
Published: 09 November 2012
...Chang‐Jian Zhou; Yi Yang; Tian‐Ling Ren Purpose This paper aims to propose a new model to study the relationship between the acoustic properties of the thickness shear mode (TSM) in lateral field excited (LFE) film bulk acoustic wave resonator (FBAR) and the gap distance of the surface electrodes...
