... electro-thermo-mechanical analysis is carried out using micro electro mechanical system (MEMS) CAD tool CoventorWare to illustrate its performance. Findings This paper reports analytical and numerical simulation of basic MEMS ETC actuator-based logic gates. The proposed logic gate operates on 5 V...

... ) | T 0 = 2 % / K (3) ε ( T ) = ε ( T 0 ) ( 1 + α ( T − T 0 ) ) , f o r   a q u e o u s   S o l u t i o n : α = 1 ε ( T 0 ) ( ∂ ε ∂ T ) | T 0 = − 0.4 % / K , MEMS Electrical...

... finite element methods combined with LUA and Matlab. The paper focuses on analysis of electrostatic micromotor and uses computer simulation procedure leading to new structure design. Findings This strategy enables changing of all parameters of the micromotors MEMS. Moreover, this strategy allows...

... simulations. The next project concerned chemical sensors, where specialized models were developed and implemented in VHDL‐AMS in order to perform multidomain behavioral simulations. Dedicated tools were also developed for medical applications. Findings The evolution of MEMS technology is strictly...

... for two different MEMS actuators, which are varied in the geometric parameters of the used coil and of the PM, respectively. Depending on these results, the impact on the mechanical deformation of the elastomeric layers is numerically investigated. Many actuation technologies have been proposed...

... 2010 MEMS Voltage Finite element analysis Electromechanical devices The mechanical deformation is taken into account using the simplified linear isotropic theory of elasticity, represented by the Euler‐Bernoulli beam equation: Equation 9 where u is the displacement at position...

... by use of the equivalent circuits model could make it possible to reduce the discrepancy between the field and circuit models. These results were obtained after comparing both field and circuit models. Originality/value MEMS microdrives are in the area which is being developed very dynamically...

...Sławomir Wiak; Andrzej Krawczyk; Ivo Doležel; E. Costamagna; P. Di Barba; A. Savini Purpose This paper sets out to provide a numerical procedure for field analysis and shape design for a class of MEMS devices. Design/methodology/approach The proposed numerical procedure for field analysis...

...Oszkar Biro; David A. Lowther; Piergiorgio Alotto; Weijie Wan; David A. Lowther Purpose To present a general synthesis method in the design of variable comb drive MEMS capacitors which can provide specified capacitance versus position profiles while give large tuning range. Design/methodology...