... electro-thermo-mechanical analysis is carried out using micro electro mechanical system (MEMS) CAD tool CoventorWare to illustrate its performance. Findings This paper reports analytical and numerical simulation of basic MEMS ETC actuator-based logic gates. The proposed logic gate operates on 5 V...

... at: rzvafaiee@gmail.com 13 03 2017 29 06 2017 17 08 2017 17 08 2017 © Emerald Publishing Limited 2018 Emerald Publishing Limited Licensed re-use rights only MEMS Electrical conductivity gradients Lab on a chip Low Reynolds number flow Microfluidic Pulsed AC...

... finite element methods combined with LUA and Matlab. The paper focuses on analysis of electrostatic micromotor and uses computer simulation procedure leading to new structure design. Findings This strategy enables changing of all parameters of the micromotors MEMS. Moreover, this strategy allows...

... simulations. The next project concerned chemical sensors, where specialized models were developed and implemented in VHDL‐AMS in order to perform multidomain behavioral simulations. Dedicated tools were also developed for medical applications. Findings The evolution of MEMS technology is strictly...

... theorem and solving the integral equation over an enclosed surface: Equation 14 © Emerald Group Publishing Limited 2011 Actuators MEMS Force measurement Fluid flow may be manipulated by wall motion, induced wall temperature variations and fluid mass injection using macro scale...

... the behavior of beam‐like MEMS structures, a coupled type problem needs to be solved. This paper presents two approaches to build FEM‐based models for the aforementioned systems. The first approach is a FEM‐analytical model which uses the FEM for the electrostatic problem, to compute the electric field in both...

...Sławomir Wiak; Andrzej Krawczyk; Ivo Doležel; E. Costamagna; P. Di Barba; A. Savini Purpose This paper sets out to provide a numerical procedure for field analysis and shape design for a class of MEMS devices. Design/methodology/approach The proposed numerical procedure for field analysis...

... by use of the equivalent circuits model could make it possible to reduce the discrepancy between the field and circuit models. These results were obtained after comparing both field and circuit models. Originality/value MEMS microdrives are in the area which is being developed very dynamically...

...Oszkar Biro; David A. Lowther; Piergiorgio Alotto; Weijie Wan; David A. Lowther Purpose To present a general synthesis method in the design of variable comb drive MEMS capacitors which can provide specified capacitance versus position profiles while give large tuning range. Design/methodology...