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Keywords: Magnetron sputtering
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Journal Articles
COMPEL (2012) 31 (2): 514–527.
Published: 02 March 2012
...Daniele Desideri; Alvise Maschio; Dan Doru Micu; Olivia Ramona Miron Purpose The aim of the work was to obtain an auxiliary instrument able to give the magnetic configuration of a magnetron sputtering device for operation with targets, magnetic and non magnetic, with different heights, starting...
Journal Articles
COMPEL (2005) 24 (1): 261–270.
Published: 01 March 2005
...D. Desideri; M. Bagatin; M. Spolaore; V. Antoni; R. Cavazzana; E. Martines; G. Serianni; M. Zuin Purpose The aim of this paper is to obtain an extensive experimental characterization of a DC magnetron sputtering device used for plasma processing of materials. Design/methodology/approach Models...
