...Salatiel García-Moreno; Manuel Bandala-Sánchez Purpose This paper intends to lay a background knowledge towards the feasibility of developing a bottom-drive variable capacitance micromotor (VCM) using a surface micromachining process (SMP). The purpose of this paper is to determine the possibility...

...Andrzej Demenko; Kay Hameyer; Wojciech Pietrowski; Livio Šušnjić; Krzysztof Zawirski; Slawomir Wiak; Krzysztof Smółka Purpose This paper aims to focus on the hybrid numerical method for effective design of silicon micromotor. Design/methodology/approach In this work, the authors introduced...

.../methodology/approach In this paper several approaches are presented. First, microsystems were built in multi project wafer technology. They were demonstrators like micromotor, micromirrors or micropumps modeled using dedicated design tool. A multi purpose chip was also designed using HDL description and FEM...

...Adam Pelikant; Sl§awomir Wiak; Krzysztof Komęza This paper presents the results of silicon micromotor static and dynamic simulations by means of finite element method and the Moulton‐Adams algorithm as well. Capacitance and torque curves calculation. The virtual work principle has been applied...