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Keywords: Plate bending
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Journal Articles
COMPEL (2016) 35 (5): 1617–1624.
Published: 05 September 2016
... Emerald Group Publishing Limited 2016 Emerald Group Publishing Limited Licensed re-use rights only Micromotor Plate bending Surface micromachining Variable capacitance Variable capacitance micromotors (VCM) were developed in the late 1980s as transducers of electrical energy...
