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Keywords: Plate bending
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Journal Articles
Multiphysical computation of the structural bending in a bottom-drive VCM
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COMPEL (2016) 35 (5): 1617–1624.
Published: 05 September 2016
.... Micromotor Plate bending Surface micromachining Variable capacitance Variable capacitance micromotors (VCM) were developed in the late 1980s as transducers of electrical energy into mechanical energy (Trimmer and Gabriel, 1987). The foreseen applications for VCMs are: micro robotics (Lu et al...
