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Keywords: Pressure sensor
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Journal Articles
COMPEL (2012) 31 (5): 1458–1469.
Published: 07 September 2012
... Water monitoring ChemFET Thermal actuator Pressure sensor The main goal of this paper is a discussion of the methods of modelling methodology and computer aided design (CAD) of microsystems in the space of the last 20 years. The first modelling approach was developed during the ESPRIT‐BARMINT...

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