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Keywords: Surface micromachining
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Journal Articles
Multiphysical computation of the structural bending in a bottom-drive VCM
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COMPEL (2016) 35 (5): 1617–1624.
Published: 05 September 2016
...Salatiel García-Moreno; Manuel Bandala-Sánchez Purpose This paper intends to lay a background knowledge towards the feasibility of developing a bottom-drive variable capacitance micromotor (VCM) using a surface micromachining process (SMP). The purpose of this paper is to determine the possibility...
