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The development of high density packaging technologies offers cost reduction, smaller system volumes and better performance. High performance PCBs with fine line technology reach conductor widths of <0.1 mm and pitches of <0.2 mm. The limiting factors for higher densities of PCBs are the mechanically drilled through‐holes. In particular, the assembly of modern ICs with a pitch of less than 0.2 mm requires fine line technology and a simultaneous reduction of via diameters to minimise fan‐out areas. To meet these requirements, an interconnection system with photosensitive polyimide as an interdielectric thin film layer on top of a PCB is investigated. To demonstrate process feasibility, a test module including a test structure for measurement of contact resistance has been fabricated.

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