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Keywords: Magnetron sputtering
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Journal Articles
Circuit World (2022) 48 (2): 149–159.
Published: 07 December 2020
... optoelectronics and photovoltaics. However, the properties of ITO thin films depend on many factors. Therefore, the aim of the study was thorough investigation of the properties of sputtered ITO thin films of various thicknesses. Design/methodology/approach ITO coatings were deposited by magnetron sputtering...

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