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Keywords: Micro‐devices
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Journal Articles
Integrated MEMS in package
Available to Purchase
Journal:
Circuit World
Circuit World (2012) 38 (4): 184–192.
Published: 16 November 2012
... Electroplating Heterogeneous integration Micro‐devices Packaging Electromechanical devices Micro‐electromechanical systems (MEMS) are small devices with tiny moving parts designed to perform sensing or actuation functions. Successful commercial products include pressure sensors, accelerometers...
