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Keywords: RF switch MEMS
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Journal Articles
Journal:
Circuit World
Circuit World (2019) 45 (2): 53–64.
Published: 07 May 2019
... V and the axial residual stress of the proposed design was obtained 25 MPa. Originality/value A novel complex strategy in the design and optimization of capacitive RF switch MEMS modeling is proposed. Table I presents the parameters of the equation (2) . The amount of capacitor varies...
