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Keywords: Semiconductor manufacturing
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Journal Articles
Journal:
Data Technologies and Applications
Data Technologies and Applications (2023) 57 (3): 397–417.
Published: 07 February 2023
...Eunji Kim; Jinwon An; Hyun-Chang Cho; Sungzoon Cho; Byeongeon Lee Purpose The purpose of this paper is to identify the root cause of low yield problems in the semiconductor manufacturing process using sensor data continuously collected from manufacturing equipment and describe the process...
