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Keywords: Cu thin films
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Journal Articles
Journal:
Engineering Computations
Engineering Computations 1–17.
Published: 12 May 2026
...Ming Wang; Li Tian; Shuhao Wang; Mingyang Zuo; Jiayin Song; Jie Sun Purpose Copper (Cu) thin films have been widely studied and applied in microelectronic devices due to their low resistivity, high melting point, good adhesion to various substrates and low electron mobility. In this paper...
