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Poisson’s equation and the electron continuity equation, together with heat flow equation are solved self‐consistently to obtain the lattice temperature profile under non‐isothermal conditions in a power VDMOS transistor. The effect of the variable lattice temperature on the forward characteristics of VDMOSTs is presented, and discussed. The results show that self‐heating in power VDMOSTs has a significant effect. The thermal coupling effects on the forward I—V characteristics are compared and discussed between the power VDMOST and the conventional MOSFET.

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