Keywords: Multilayers
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Journal Articles
Journal Articles
International Journal of Numerical Methods for Heat & Fluid Flow (1998) 8 (4): 409–423.
Published: 01 June 1998
... on the parallel “divide and conquer” procedure for tridiagonal linear systems. Numerical results show that such a method is efficient. © MCB UP Limited 1998 Microfabrication Multilayers Numerical methods Photoresist X‐ray X‐ray irradiation of photoresists, such as polymethylmethacrylate...
Journal Articles
Journal Articles
International Journal of Numerical Methods for Heat & Fluid Flow (1997) 7 (7): 659–674.
Published: 01 November 1997
... or for computations on fine spatial meshes. Numerical procedures that employ the generalized Douglas ADI scheme were developed to solve three‐dimensional parabolic differential equations on multilayers. In these procedures, the generalized “divide and conquer” method for solving tridiagonal linear systems is applied...

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