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Keywords: X‐ray
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Journal Articles
A three‐dimensional numerical method for thermal analysis in X‐ray lithography
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International Journal of Numerical Methods for Heat & Fluid Flow (1998) 8 (4): 409–423.
Published: 01 June 1998
...W. Dai; R. Nassar X‐ray irradiation of photoresists, such as polymethylmethacrylate (PMMA), on a silicon substrate is an important technique in micro fabrication used to obtain structures and devices with a high aspect ratio. The process is composed of a mask and a photoresist deposited...
