The paper aims to evaluate the influence of atmospheric environment on the conductivity of nanoscale copper films sputtered on polyester substrates; process parameters of optimal conductivity were firstly analyzed by orthogonal test scheme design, and then the surface morphology, crystal structures and conductivity of samples were performed after samples were placed in the atmospheric conditions for some time according to the optimization of process parameters.
Nanoscale copper films was prepared by RF (radio frequency) magnetron sputtering and low-temperature plasma technology with polyester fabrics as substrates and metal copper as targets under the conditions of low temperature and high vacuum.
The experimental results showed that copper films were broken and the continuity of samples was destroyed after 60 days, while exposed in atmospheric environment for 90 days, cracks of copper films gradually expanded, there was no change in the atomic species for samples placed in the atmospheric conditions. However, the conductivity of the samples hardly had changed with the ambient temperature, humidity and degree of water washing, which is mainly decided by the internal structures of substrates.
This paper has some theoretical and applicable value to the functional textile.
