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Keywords: Electromechanical devices
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Journal Articles
International Journal of Structural Integrity (2010) 1 (3): 193–208.
Published: 01 August 2010
... Electromechanical devices In many current applications of micro‐electromechanical systems (MEMS) and nanotechnology, typical structural components are in the form of beams, bars, plates and membranes (e.g. sensors and actuators) and deform elastically (Senturia, 2001). These micro‐structural components...
