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Keywords: Micro‐electro‐mechanical systems
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Journal Articles
International Journal of Structural Integrity (2013) 4 (2): 191–205.
Published: 24 May 2013
...Gilad Sharon; Rachel Oberc; Donald Barker Purpose The development of micro‐electro‐mechanical systems (MEMS) for use in military and consumer electronics necessitates an analysis of MEMS component reliability. The understanding of the reliability characteristics of SCSi within MEMS structures...
