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Keywords: Single crystal silicon
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Journal Articles
International Journal of Structural Integrity (2013) 4 (2): 191–205.
Published: 24 May 2013
... to predict its reliability, and to verify this method through experimentation. Design/methodology/approach The dynamic fracture strength of single crystal silicon (SCSi) was used to model MEMS devices subjected to high shock loading. Experimentation with SCSi MEMS structures was performed following...
