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Keywords: Chemical mechanical polishing
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Journal Articles
Journal:
Industrial Lubrication and Tribology
Industrial Lubrication and Tribology (2024) 76 (1): 50–58.
Published: 12 December 2023
... between polishing pad and workpiece. Nonetheless, the glazed phenomena on the sample surface are inevitable. Chemical mechanical polishing Glazing evolution Fixed abrasive pad Polishing solution Chemical mechanical polishing (CMP) technology, due to its ultrahigh accuracy and global...
