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Keywords: Chemical-mechanical polishing
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Journal Articles
Effect of thermal activation temperature on chemical-mechanical polishing of titanium alloy
Available to Purchase
Journal:
Industrial Lubrication and Tribology
Industrial Lubrication and Tribology (2025) 77 (9): 1528–1538.
Published: 27 January 2025
... The titanium alloys were chemically mechanically polished under various temperatures. The removal rate and surface roughness were characterized using a three-dimensional topography tester. The surface composition, content and valence state were characterized by X-ray photoelectron spectroscopy. The abrasion...
Includes: Supplementary data
