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Keywords: Hard thin film
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Journal Articles
Tribological properties and mechanisms of three kinds of hard thin films for semiconductor shear pin
Journal:
Industrial Lubrication and Tribology
Industrial Lubrication and Tribology 1–15.
Published: 29 June 2026
...Zhe Geng; Yu Zuo; Gaolian Shi; Zhangbin Jin; Yang Liu Purpose This paper aims to investigate the tribological properties and mechanisms of three kinds of PVD/ CVD hard thin films for the semiconductor shear pins. Design/methodology/approach TiN and CrN films were prepared via multi-arc ion...
