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Keywords: Nanoimprint
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Journal Articles
Chaoran Liu, Yufeng Su, Jinzhao Yue, Junjie Wang, Weiwei Xia, Dongxue Li, Wen Wang, Pan Wang, Zhiyong Duan
Journal:
Industrial Lubrication and Tribology
Industrial Lubrication and Tribology (2017) 69 (4): 591–597.
Published: 10 July 2017
...Chaoran Liu; Yufeng Su; Jinzhao Yue; Junjie Wang; Weiwei Xia; Dongxue Li; Wen Wang; Pan Wang; Zhiyong Duan Purpose A self-adaptive piston is designed for the compressional gas cushion press nanoimprint lithography system. It avoids the lube pollution and high wear of traditional piston. Design...
