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Keywords: Nitride film
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Journal Articles
Tribological properties and mechanisms of three kinds of hard thin films for semiconductor shear pin
Journal:
Industrial Lubrication and Tribology
Industrial Lubrication and Tribology 1–15.
Published: 29 June 2026
... 03 2026 01 06 2026 © 2026 Emerald Publishing Limited 2026 Emerald Publishing Limited Licensed re-use rights only Friction and wear Shear pin Hard thin film Wear mechanism Nitride film DLC Jiangsu province universities 23KJA460012 Qinglan Project of Jiangsu...
