..., the purpose of this paper is to present a numerical investigation of the effect of misalignment and rarefaction effect on the comprehensive performance of micro-electrical-mechanical system (MEMS) gas bearing. Design/methodology/approach The Fukui and Kaneko model is expanded to 2D solution domain...

...Dongju Chen; Lihua Dong; Ri Pan; Jinwei Fan; Qiang Cheng Purpose The purpose of this study is to investigate the coupling effects of the velocity slip, rarefaction effect and effective viscosity of the gas film on the performance of the aerostatic guideway in micro-scale and improve the analysis...