... format for semiconductor manufacturing systems (SMS). The resulting calendar‐time PM schedules can be utilized as a baseline within a PM scheduling optimization process. Design/methodology/approach The algorithm utilizes estimations of work‐in‐process (WIP) and system parameters to estimate...

... in furtherance to the equipment maintenance objectives. Design/methodology/approach A systematic implementation‐framework coupled with the standard tools, techniques and practices has been designed. The framework was applied in a large semiconductor manufacturing company. Findings It is evident...