The purpose of this paper is to develop the multi‐degree‐of‐freedom measurement system to test, verify, and control the nano‐measuring machine.
A generic differential model approach is constructed to numerically describe the hysteresis effects of piezoelectric actuators. Based on the generic differential model, a feedforward compensator with a proportional integral (PI) type controller is designed to compensate for the hysteresis nonlinearity of a piezoelectric actuated three degree‐of‐freedom coplanar nanostage which can provide high‐precision applications.
The Z‐tilts (z, pitch, and roll motion) error compensation stage of the nano‐measuring machine is accomplished. Moreover, a high‐resolution laser interferometer is used to measure position accurately.
This paper contributes to develop a tracking control design method for the piezoelectric motion platform which combines a closed‐loop feedforward compensator with a PI type controller.
