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Keywords: Actuators
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Journal Articles
Measurement and tracking control of the Z‐tilts error compensating stage of the nano‐measuring machine
Available to Purchase
Journal:
Kybernetes
Kybernetes (2010) 39 (6): 1029–1039.
Published: 15 June 2010
.../approach A generic differential model approach is constructed to numerically describe the hysteresis effects of piezoelectric actuators. Based on the generic differential model, a feedforward compensator with a proportional integral (PI) type controller is designed to compensate for the hysteresis...
