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Keywords: A-axis oriented AlN films
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Journal Articles
Structural and mechanical properties of a-axis AlN thin films growth using reactive RF magnetron sputtering plasma
Available to PurchaseAnis Suhaili Bakri, Nafarizal Nayan, Chin Fhong Soon, Mohd Khairul Ahmad, Ahmad Shuhaimi Abu Bakar, Wan Haliza Abd Majid, Nur Amaliyana Raship
Journal:
Microelectronics International
Microelectronics International (2021) 38 (3): 99–104.
Published: 16 June 2021
... films. Anis Suhaili Bakri can be contacted at: anishjbakri92@gmail.com 03 02 2021 28 02 2021 22 04 2021 © Emerald Publishing Limited 2021 Emerald Publishing Limited Licensed re-use rights only Plasma Nanoindentation A-axis oriented AlN films Crystal structure...
