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Keywords: Coating
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2000) 17 (3)
Published: 01 December 2000
... © MCB UP Limited 2000 --> Manitou Systems Generators Thin film Coating Frequency shift tuning RF power generators enable ultra-thin film deposition in high-speed coating systems Keywords Manitou Systems, Generators, Thin film, Coating Manitou Systems, Inc. has...
