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Keywords: FET structure
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Journal Articles
Influence of AlN etching process on MISFET structures
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2019) 36 (3): 109–113.
Published: 18 June 2019
... of MISFET fabrication process with cross-sectional view of the structures 06 12 2018 06 12 2018 26 02 2019 © Emerald Publishing Limited 2019 Emerald Publishing Limited Licensed re-use rights only Thin film AlN Dry etching FET structure I–V characterization...
