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Keywords: Gases
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Journal Articles
Microelectronics International (2009) 26 (2): 37–40.
Published: 08 May 2009
... Publishing Limited 2009 Diodes Sintering Chemical technology Series Gases An issue in the scaling of CMOS technology is the control of the pn junction's leakage, which is one of the major factors for off‐state current and power dissipation. For shallow junctions...

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