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Keywords: Heating
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2010) 27 (2): 93–97.
Published: 11 May 2010
... in nitrogen is more favourable to reduce oxide traps (Hill and Coleman, 1980 ; Gruger et al., 2004 ; Umezawa et al., 2007 ; Xiong et al., 2006 ; Gavartin et al., 2006). Films (states of matter) Nitrogen Oxygen Heating Cooling The effect of temperature...
