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Keywords: MCM‐Si
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Journal Articles
A five‐layer thin film MCM‐Si design using oxynitride dielectrics
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (1998) 15 (1): 39–42.
Published: 01 April 1998
... to be taken into account when designing the lines, leading to a minimal achievable line width of about 10μm in a 30μm pitch. © MCB UP Limited 1998 In the following sections, some characteristics of the five‐layer MCM‐Si are presented, together with a typical process flow...
