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Keywords: Manitou Systems
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Journal Articles
Microelectronics International (2000) 17 (3)
Published: 01 December 2000
... © MCB UP Limited 2000 --> Manitou Systems Generators Thin film Coating Frequency shift tuning RF power generators enable ultra-thin film deposition in high-speed coating systems Keywords Manitou Systems, Generators, Thin film, Coating Manitou Systems, Inc. has...
Journal Articles
Microelectronics International (2000) 17 (2)
Published: 01 August 2000
... For further information, please contact: Steven M. Simons. Tel: 203-792-8797,ext.302; E-mail: ssimons@manitousys.com © MCB UP Limited 2000 --> Manitou Systems Thin film Plasma Keywords Manitou Systems, Thin film, Plasma Manitou Systems, Inc. has introduced a new...

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